The calendar below provides information on the course's lecture, lab, and quiz sessions. In addition, the instructor for each session is given according to the following key:
MAS = Martin Schmidt
RCOH = Robert O' Handley
SR = Susan Ruff
Course calendar.
| LEC # |
TOPICS |
LABS |
KEY DATES |
| 1 |
Overview/Safety/Lab Assignment (MAS)
CIM: Introduction to CIM (SR) |
|
Homework 1 out |
| 2 |
IC Lab - Overview (MAS) |
IC-1: Gate Oxide/Poly |
|
| 3 |
Oxidation (MAS) |
|
Homework 1 due
Homework 2 out |
|
|
IC-2: Backside Etch |
|
| 4 |
Diffusion (RCOH) |
|
Homework 2 due
Homework 3 out |
| 5 |
IC Lab: Testing (MAS)
CIM: Writing Technical Reports (SR) |
IC-3: Test |
IC lab report out |
| 6 |
Diffusion/Implantation (RCOH) |
|
|
| 7 |
MEMS Lab: Overview (MAS) |
MEMS-1: Photolith |
Homework 3 due
IC lab report due (in lab) |
| 8 |
Vacuum System (RCOH) |
|
Homework 4 out |
| 9 |
CVD (RCOH) |
|
|
| 10 |
Sputtering (RCOH)
CIM: Feedback on IC Report, Reports Returned (SR) |
MEMS-2: KOH Etch |
Homework 4 due
Homework 5 out |
|
Quiz 1: Through CVD (Staff) |
|
|
| 11 |
Fluids Lab: Overview (MAS) |
Fluids-1: Photolith |
|
| 12 |
Evaporation (RCOH) |
|
Revised IC report due |
| 13 |
MEMS Lab: Testing (MAS) |
MEMS-3: Test |
Homework 5 due
MEMS lab report out |
| 14 |
Lithography (MAS) |
|
Homework 6 out
Revised IC report returned |
| 15 |
Lithography, Soft Lithography (MAS) |
|
|
| 16 |
Etching (Wet) (RCOH) |
|
Homework 6 due
Homework 7 out |
| 17 |
Etching (Dry) (RCOH) |
Fluids-2: Molding |
MEMS lab report due |
| 18 |
CMOS (MAS) |
|
Homework 7 due
Homework 8 out |
| 19 |
Advanced Silicon Devices (MAS) |
|
|
| 20 |
Fluids Lab: Testing (MAS) |
|
Homework 8 due
Take home exam out |
| 21 |
Take Home Introduction / Patents (MAS) |
Fluids-3: Test |
Fluids lab report out |
|
Quiz 2: Through Advanced Silicon Devices (Staff) |
|
|
| 22 |
Take Home Discussion (MAS) |
|
|
| 23 |
Advanced Topics (Guest) |
|
Fluids lab report due |
| 24 |
Advanced Topics (cont.) (Guest) |
|
|
| 25 |
Analog Devices Fab Tour |
|
Take home quiz due |