| 1 |
Overview of Semiconductor Manufacturing |
|
| Statistical Process Control |
| 2 |
Statistics Review: Distributions |
|
| 3 |
Statistics Review: Estimation |
PS #1 Due |
| 4 |
Hypothesis Tests and Control Chart Introduction |
|
| 5 |
Control Charts |
|
| 6 |
Advanced Control Charts, Nested Variance |
PS #2 Due |
| Experimental Design |
| 7 |
Analysis and Design of Experiments |
|
| 8 |
ANOVA, Variance Component Estimation |
PS #3 Due |
| 9 |
MANOVA, Factorial Experiments
Quiz #1 |
|
| Yield and Yield Learning |
| 10 |
Design of Experiments and Response Surface Modeling |
|
| 11 |
RSM and Regression |
PS #4 Due |
| 12 |
Yield Management and Modeling |
|
| 13 |
Yield Modeling |
PS #5 Due |
| Advanced Process Control |
| 14 |
Spatial Modeling |
|
| 15 |
Sensors and Signals |
PS #6 Due |
| 16 |
PCA and Time Series |
|
| 17 |
Run by Run Control |
Critical Paper Review Due |
| 18 |
Real Time Control, Scheduling |
|
| Factory Operation and Design |
| 19 |
Scheduling
Quiz #2 |
PS #7 Due |
| 20 |
Planning |
|
| 21 |
Factory Design and Efficiency |
|