| 1 |
Overview of Semiconductor Manufacturing (PDF) |
| Statistical Process Control |
| 2 |
Statistics Review: Distributions (PDF) |
| 3 |
Statistics Review: Estimation (PDF) |
| 4 |
Hypothesis Tests and Control Chart Introduction (PDF) |
| 5 |
Control Charts |
| 6 |
Advanced Control Charts, Nested Variance (PDF) |
| Experimental Design |
| 7 |
Analysis and Design of Experiments (PDF) |
| 8 |
ANOVA, Variance Component Estimation |
| 9 |
MANOVA, Factorial Experiments (PDF)
Quiz #1 |
| Yield and Yield Learning |
| 10 |
Design of Experiments and Response Surface Modeling (PDF) |
| 11 |
RSM and Regression (PDF) (PDF) |
| 12 |
Yield Management and Modeling |
| 13 |
Yield Modeling |
| Advanced Process Control |
| 14 |
Spatial Modeling |
| 15 |
Sensors and Signals (PDF) |
| 16 |
PCA and Time Series |
| 17 |
Run by Run Control (PDF) |
| 18 |
Real Time Control, Scheduling |
| Factory Operation and Design |
| 19 |
Scheduling (PDF)
Quiz #2 |
| 20 |
Planning (PDF) |
| 21 |
Factory Design and Efficiency (PDF) |