| 1 |
Introduction — processes and variation framework |
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| 2 |
Semiconductor process variation |
Assignment 1 out |
| 3 |
Mechanical process variation — physical causes and interpreting data |
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| 4 |
Probability models of manufacturing processes |
Assignment 1 due, assignment 2 out |
| 5 |
Probability models, parameter estimation, and sampling |
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| 6 |
Sampling distributions and statistical hypotheses |
Assignment 2 due, assignment 3 out |
| 7 |
Shewhart SPC and process capability |
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| 8 |
Process capability and alternative SPC methods |
Assignment 3 due, assignment 4 out |
| 9 |
Advanced and multivariate SPC |
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| 10 |
Yield modeling |
Assignment 4 due, assignment 5 out |
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Quiz 1 (covers through Ses #9)
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| 11 |
Introduction to analysis of variance |
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| 12 |
Full factorial models |
Assignment 5 due, assignment 6 out |
| 13 |
Modeling testing and fractional factorial models |
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| 14 |
Aliasing and higher order models |
Assignment 6 due, assignment 7 out |
| 15 |
Response surface modeling and process optimization |
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| 16 |
Process robustness |
Assignment 7 due, assignment 8 out |
| 17 |
Nested variance components |
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| 18 |
Sequential experimentation: "Experimentation and Robust Design and Engineering Systems." |
Assignment 8 due |
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Quiz 2
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| 19 |
Case study 1: tungsten CVD DOE/RSM |
Project proposal due |
| 20 |
Case study 2: cycle to cycle control |
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| 21 |
Case study 3: spatial modeling |
Project meeting due |
| 22 |
Case study 4: "Modeling the Embossing/Imprinting of Thermoplastic Layers." |
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| 23 |
Project presentations 1 |
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| 24 |
Project presentations 2 |
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