To keep the hot plates clean, the SU-8 coated wafer is placed in the center of a larger wafer. This process ensures a good thermal contact between the hot plate and the wafer.
(Photo by Dr. Aranyosi.)
To keep the hot plates clean, the SU-8 coated wafer is placed in the center of a larger wafer. This process ensures a good thermal contact between the hot plate and the wafer.
(Photo by Dr. Aranyosi.)