Course Meeting Times
Lectures: 1 session / week for 4 weeks, 4 hours / session
The electron microprobe provides a complete micron-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic X-rays excited by an electron beam incident on a flat surface of the sample. This course provides an introduction to the theory of X-ray microanalysis by wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and imaging techniques including scanning back-scattered electron (BE), scanning secondary electron (SE), scanning X-ray (by WDS or EDS, also known as compositional or elemental maps), and scanning cathodoluminescence (CL) imaging. Lab sessions involve hands-on use of the JEOL JXA-8200 Superprobe.
Permission of instructor.
Theory of X-ray Spectrometry
- Electron-specimen interactions
- Elastic scattering: Electron backscattering
- Inelastic scattering: Secondary electron excitation, Cathodoluminescence, Continuum X-ray generation, Characteristic X-ray generation
- Interaction volume
- Matrix corrections
- Atomic number, Absorption and Characteristic fluorescence corrections
- Continuum fluorescence correction
- φ(ρz) corrections
- Detectors in the electron microprobe
- Electron detectors: Everhart-Thornley and Solid-state diode detectors
- Cathodoluminescence detector
- X-ray detectors: Energy dispersive and Wavelength dispersive spectrometers
- Topographic imaging
- Compositional imaging with wavelength dispersive spectrometry
- Cathodoluminescence imaging
- Sample preparation
- Wavelength and energy dispersive techniques
- Background and peak overlap corrections
- Light element analysis
Goldstein, J. I., D. E. Newbury, D. C. Joy, C. E. Lyman, P. Echlin, E. Lifshin, L. Sawyer, and J. R. Michael. Scanning Electron Microscopy and X-ray Microanalysis. 3rd ed. New York, NY: Kluwer Academic/Plenum Publishers, 2003. ISBN: 9780306472923.
Reed, S. J. B. Electron Microprobe Analysis and Scanning Electron Microscopy in Geology. 2nd ed. Cambridge, UK: Cambridge University Press, 2005. ISBN: 9780521848756.
The basis for the grade is completion of all the lab exercises (problem sets) and the quiz.