Prof. Martin Schmidt
Dr. Susan Ruff
Dr. Robert O’Handley
6.152J / 3.155J
This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology.
Schmidt, Martin, Susan Ruff, and Robert O’Handley. 6.152J Micro/Nano Processing Technology, Fall 2005. (MIT OpenCourseWare: Massachusetts Institute of Technology), http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-152j-micro-nano-processing-technology-fall-2005 (Accessed). License: Creative Commons BY-NC-SA