3: Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)

Go to this audio track

4: Wafer Cleaning and Gettering (cont.)

Go to this audio track

5: Wafer Cleaning and Gettering - Contamination Measurement Techniques

Go to this audio track

6: Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models

Go to this audio track

7: Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defect

Go to this audio track

8: Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic

Go to this audio track

9: Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects

Go to this audio track

10: Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion

Go to this audio track

11: Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques

Go to this audio track

12: Ion Implantation and Annealing - Analytic Models and Monte Carlo

Go to this audio track

13: Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED

Go to this audio track

14: Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction

Go to this audio track

15: Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail

Go to this audio track

16: The SUPREM IV Process Simulator

Go to this audio track

17: Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth

Go to this audio track

18: Thin Film Deposition and Epitaxy - CVD Examples and PVD

Go to this audio track

19: Thin Film Deposition and Epitaxy - Modeling Topography of Deposition

Go to this audio track

20: Etching - Introduction

Go to this audio track

21: Etching - Poly Gate Etching, Stringers, Modeling of Etching

Go to this audio track

22: Silicides, Device Contacts, Novel Gate Materials

Go to this audio track

23: Growth and Processing of Strained Si/SiGe and Stress Effects on Devices

Go to this audio track