Design and Fabrication of Microelectromechanical Devices

Prototype design of a microsystem cooler.

An illustration of the prototype design of a microsystem cooler that is being fabricated at the NASA Glenn Research Center. The microsystem cooler is suited mostly to volume-limited applications that require cooling below the ambient or sink temperature. (Image courtesy of NASA Glenn Research Center.)

Instructor(s)

MIT Course Number

6.777J / 2.372J

As Taught In

Spring 2007

Level

Graduate

Cite This Course

Course Features

Course Description

6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

Livermore, Carol, and Joel Voldman. 6.777J Design and Fabrication of Microelectromechanical Devices, Spring 2007. (MIT OpenCourseWare: Massachusetts Institute of Technology), http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-777j-design-and-fabrication-of-microelectromechanical-devices-spring-2007 (Accessed). License: Creative Commons BY-NC-SA


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