JV: Session taught by Joel Voldman
CL: Session taught by Carol Livermore
Lecture notes files.
| LEC # |
TOPICS |
LECTURERS |
| 1 |
Introduction to MEMS; microfabrication for MEMS: part I (PDF 1) (PDF 2) |
JV/CL |
| 2 |
Microfabrication for MEMS: part II (PDF - 1.3 MB) |
CL |
| 3 |
Microfabrication for MEMS: part III (PDF - 1.5 MB) |
CL |
| 4 |
Microfabrication for MEMS: part IV; in-class fab problem (PDF) |
CL |
| 5 |
Fabrication for the life sciences; material properties (PDF) |
CL |
| 6 |
Elasticity (PDF) or electronics I (PDF) |
CL/JV |
| 7 |
Structures (PDF) or electronics II (PDF) |
CL/JV |
| 8 |
Lumped-element modeling (PDF) |
JV |
| 9 |
Energy-conserving transducers (PDF) |
JV |
| 10 |
Dynamics, especially nonlinear (PDF) |
JV |
| 11 |
Structures special topics (PDF) |
CL |
| 12 |
Thermal energy domain; dissipation (PDF) |
JV |
| 13 |
Modeling dissipative processes (PDF) |
JV |
| 14 |
Fluids 1 (PDF) |
JV |
| 15 |
Fluids 2 (PDF) |
JV |
| 16 |
Mass transport in liquids (PDF - 1.3 MB) |
JV |
| 17 |
Feedback (PDF) |
JV |
| 18 |
Noise (PDF) |
CL |
| 19 |
Packaging (PDF - 1.0 MB) |
CL |
| 20 |
In-class design problem (PDF) |
CL |
| 21 |
Design tradeoffs (PDF - 1.5 MB) |
CL |
| 22 |
Power MEMS case study (PDF - 3.1 MB) |
CL |
| 23 |
Optical MEMS case study (PDF) |
CL |
| 24 |
Capacitive accelerometer case study (PDF - 1.4 MB) |
JV |
| 25 |
BioMEMS case study (PDF) |
JV |
| |
Final presentations |
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