Semiconductor Manufacturing

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Semiconductor manufacturing course logo. (Image courtesy of MIT.)

Instructor(s)

MIT Course Number

6.780

As Taught In

Spring 2003

Level

Graduate

Cite This Course

Course Features

Course Highlights

This course site features lecture notes and student final papers. Some lectures in this class are also offered though the MIT Singapore Alliance.

Course Description

6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.

Other OCW Versions

OCW has published multiple versions of this subject. Question_OVT logo

Boning, Duane. 6.780 Semiconductor Manufacturing, Spring 2003. (MIT OpenCourseWare: Massachusetts Institute of Technology), http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-780-semiconductor-manufacturing-spring-2003 (Accessed). License: Creative Commons BY-NC-SA


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