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Semiconductor manufacturing course logo. (Image courtesy of MIT.)
Prof. Duane Boning
6.780
Spring 2003
Graduate
This course site features lecture notes and student final papers. Some lectures in this class are also offered though the MIT Singapore Alliance.
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.
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