Prof. Duane Boning
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.
OCW has published multiple versions of this subject.
Boning, Duane. 6.780 Semiconductor Manufacturing, Spring 2003. (MIT OpenCourseWare: Massachusetts Institute of Technology), http://ocw.mit.edu/courses/electrical-engineering-and-computer-science/6-780-semiconductor-manufacturing-spring-2003 (Accessed). License: Creative Commons BY-NC-SA