Control of Manufacturing Processes (SMA 6303)
As taught in: Spring 2008
To create embossed microstructures in PMMA, the silicon stamp must be carefully patterned and manufactured. (Image courtesy of Hayden Taylor. Used with permission.)
Instructors:
Prof. David Hardt
Prof. Duane Boning
MIT Course Number:
2.830J / 6.780J / ESD.63J
Level:
Course Features
Course Description
This course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control, are covered. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.
*Some translations represent previous versions of courses.
