Prof. David Hardt
Prof. Duane Boning
2.830J / 6.780J / ESD.63J
This course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control, are covered. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.
OCW has published multiple versions of this subject.
David Hardt, and Duane Boning. 2.830J Control of Manufacturing Processes (SMA 6303). Spring 2008. Massachusetts Institute of Technology: MIT OpenCourseWare, http://ocw.mit.edu. License: Creative Commons BY-NC-SA.