Course Meeting Times

Lectures: 2 sessions / week, 1.5 hours / session

Prerequisites

Either or both 2.010, 15.075 or equivalent (either or both statistics or classical controls).

Required Text

Montgomery, Douglas C. Introduction to Statistical Quality Control. 5th ed. New York, NY: Wiley, 2004. ISBN: 9780471656319.

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Hoboken, NJ: Wiley-Interscience, 2006. ISBN: 9780471784067.

Reference Texts

For Processes

Kalpakjian, S. Manufacturing Processes for Engineering Materials. 3rd ed. Menlo Park, CA: Addison Wesley, 1996. ISBN: 9780201823707.

For Statistical Analysis, SPC and Designed Experiments

Devor, R. E., T. Chang, and J. W. Sutherland. Statistical Quality Design and Control. New York, NY: Macmillan, 1992. ISBN: 9780023291807.

Hogg, R. V., and J. Ledotter. Engineering Statistics. New York, NY: Macmillan, 1987. ISBN: 9780023557903.

Bendat, J. S., and A. G. Piersol. Random Data. 2nd ed. New York, NY: Wiley Interscience, 2000. ISBN: 9780471317333.

For Feedback Control and Stochastic Control

Ogata, Katsuhiko. Modern Control Engineering. 3rd ed. Upper Saddle River, NJ: Prentice Hall, 1996. ISBN: 9780132273077.

Friedland, B. Control System Design. New York, NY: McGraw Hill, 1985. ISBN: 9780070224414.

Grading

Assignments

All except Optimization Project are to be individual efforts.