1: Introduction — Processes and Variation Framework

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2: Semiconductor Process Variation

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3: Mechanical Process Variation

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4: Probability Models of Manufacturing Processes

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5: Probability Models, Parameter Estimation, and Sampling

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6: Sampling Distributions and Statistical Hypotheses

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7: Shewhart SPC and Process Capability

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8: Process Capability and Alternative SPC Methods

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9: Advanced and Multivariate SPC

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10: Yield Modeling

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11: Introduction to Analysis of Variance

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12: Full Factorial Models

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13: Modeling Testing and Fractional Factorial Models

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14: Aliasing and Higher Order Models

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15: Response Surface Modeling and Process Optimization

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16: Process Robustness

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17: Nested Variance Components

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18: Sequential Experimentation

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19: Case Study 1: Tungsten CVD DOE/RSM

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20: Case Study 2: Cycle to Cycle Control

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21: Case Study 3: Spatial Modeling

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22: Case Study 4: "Modeling the Embossing/Imprinting of Thermoplastic Layers."

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