12.141 | January IAP 2012 | Undergraduate

Electron Microprobe Analysis


Readings are assigned in the Lecture Notes for this course. (PDF - 3.1MB)

1 Introduction; electron-specimen interactions; electron detectors; scanning electron imaging (backscattered and secondary electron, BSE and SE); cathodoluminescence (CL) imaging; qualitative analysis using BSE imaging and energy dispersive spectrometry (EDS). Course notes, pp. 3–7, 22–25, and 36–37.
2 X-ray generation, emission, detection and measurement; wavelength dispersive spectrometer (WDS); analyzing crystals and proportional counters; WDS signal processing with single channel analyzer; compositional imaging (X-ray mapping) using WDS. Course notes, pp. 7–11 and 25–35.
3 Quantitative analysis using WDS; sample preparation; carbon coating; peak and background in WD spectra; detector settings through pulse height analysis; peak overlap corrections. Course notes, pp. 36–40.
4 Matrix (ZAF) corrections in quantitative analysis; φ(ρz) corrections. Course notes, pp. 12–21.

Course Info

As Taught In
January IAP 2012
Learning Resource Types
Lecture Notes
Problem Sets