2-008s04-th.jpg
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2-008s04-th.jpg
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Bulk micromachined silicon bonded on top of pyrex with a back side hole.
Caption:
A diagram showing bulk micromachined silicon bonded on top of pyrex with a back side hole. The membrane deflection is measured by four piezoresistors forming a Wheatstone bridge to get the pressure from the back side hole. (Image courtesy of OCW.)
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Spring
2004
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