Calendar

In the calendar below sessions 1 to 18 are lecture sessions and 19 to 24 are lab sessions.

SES # TOPICS SESSION CATEGORIES INSTRUCTORS  KEY DATES
1 Introduction to MuSS and SPM Case Study

Course Goals, Logistics and Expectations

Comparison of MuSS and MoSS Fundamentals

MuSS Example: Overview of SPM Technology

Fundamental Principles Prof. Martin L. Culpepper Assessment test
2 MuSS Design Fundamentals and Methods

MuSS Design Fundamentals and Methods

Design Principles and Systems Design

MuSS Manufacturing Issues

Fundamental Principles Prof. Sang-Gook Kim

3 Macro/Meso-scales Components and Characteristics

Principles, Metrics and Types of Cross-scale Incompatibilities

Incompatibilities of Macro/Meso Parts with Micro/Nano Parts

Integrating Constraints on Macro/Meso-scale Parts

Fundamental Principles Prof. Martin L. Culpepper

4 Micro-scale Components and Characteristics

Principles of Macro/Meso-scale and Micro-scale Part Integration

Incompatibilities of Micro Parts with Nano Parts

Micro-scale Part Errors and Implications for Integration

Fundamental Principles Prof. Martin L. Culpepper Problem set 1 due
5 Nano-scale Components and Characteristics

Principles of nm-scale Physics which govern Integration Incompatibility

Nano-scale Actuators, Structures and Sensors

Trasmissability of Nano-scale Errors to Other Scales

Fundamental Principles Prof. Martin L. Culpepper

6 Scanning Probe Microscopy Project Introduction

Project Goals and Expectations

Demonstration of 2.76 SPM

Questions, Team Selection and Planning

Case Study/Application Soohyung Kim, Course TA Problem set 2 due
7 Piezo MEMS: Materials

Piezoelectricity

Materials

Processing

Fundamental Principles Prof. Sang-Gook Kim Problem set 3 due
8 Piezoelectric MEMS: Applications

Piezoelectric Transducers

Micro-actuators

Sensors and Generators

Case Study/Application Prof. Sang-Gook Kim

9 Optical MEMS

Functionality

Devices

Materials

Fundamental Principles Prof. Sang-Gook Kim

10 Nominal and Statistical Error Budgets

Principles of Determinism, Accuracy, Repeatability

Kinematic Error Modeling of Rigid-flexible Systems

Nominal and Probabilitic System Error Modeling

Design and Manufacturing Prof. Martin L. Culpepper Literature critiques due
11 Presentations on Paper Critiques

Students Problem set 4 due
12 Mechanical Interfaces for Cross-scale Alignment

Principles of Mechanical Constraint

Design of Rigid, Flexible and Rigid-flexible Constraint

Manufacturing and Assembly of Cross-scale Interfaces

Design and Manufacturing Prof. Martin L. Culpepper

13 Mechanisms for Inter-scale Motion

Principles of Mass, Momentum and Energy Incompatibility

Momentum Incompatibilities

Energy Incompatibilities

Design and Manufacturing Prof. Martin L. Culpepper Problem set 5 due
14 Carbon Nanotubes

Synthesis

Properties and Applications

Issues of Manufacturing

Design and Manufacturing Prof. Sang-Gook Kim Problem set 6 due
15 Complexity of MuSS

Uncertainty and Difficulty

Complexity

Functional Periodicity

Design and Manufacturing Prof. Sang-Gook Kim

16 Metrology

System Requirements

Components and Selection Process

Metrology-Machine Integration

Design and Manufacturing Guest Lecturer

17 Telescopes and the Oil Industry

X-Ray Telescopes

Oil-well MEMS Sensors

Questions and Discussion

Case Study/Application Guest Lecturer

18 Data Acquisition, Sensors and Control

Programming in Simulink®

Introduction to dSPACE Control System

Demonstration of Acquisition and Control System

Design and Manufacturing Guest Lecturer

19 Pre-amplifier Electronics

Assemble Amplifier

Interface with Data Acquisition and Controls

Characterize and Optimize Signal-to-Noise Ratio

Integration and Assembly Lab Staff

20 Probe and 3 Axis Flexure Stage

Fabricate Probes and Characterize Geometry

Fabricate and Assemble 3-axis Flexure

Characterize Six-axis Stiffness and Parasitic Errors

Integration and Assembly Lab Staff

21 Actuators

Fabricate Actuation Flexure Mounts

Characterize Flexure Mount Stiffness

Characterize Actuator-flexure Errors, Range, Resolution

Integration and Assembly Lab Staff

22 Metrology

Integrate Metrology, Actuators and Stage

Characterize/Compensate Errors, Resolution and Range

Repeatability and Stability Characterization

Integration and Assembly Lab Staff

23 Mapping

Map and Navigate Test Maze I, II, III

Integration and Assembly Lab Staff

24 Contest

Contest Introduction, Round I, Round II

Demonstration Lab Staff

25 Course Wrap up

Course Wrap up and Awards

Tau Beta Pi Evaluation

Post-class Assessment

Assessment test

Course Info

Learning Resource Types

notes Lecture Notes
group_work Projects
assignment Problem Sets
assignment Written Assignments