Lecture Notes

Class sessions 1 through 18 are lectures. Notes for most of these sessions are provided in the following table.

SES # TOPICS SESSION CATEGORIES INSTRUCTORS LECTURE NOTES
1 Introduction to MuSS and SPM Case Study

Course Goals, Logistics and Expectations

Comparison of MuSS and MoSS Fundamentals

MuSS Example: Overview of SPM Technology

Fundamental Principles Prof. Martin L. Culpepper ( PDF)
2 MuSS Design Fundamentals and Methods

MuSS Design Fundamentals and Methods

Design Principles and Systems Design

MuSS Manufacturing Issues

Fundamental Principles Prof. Sang-Gook Kim ( PDF - 1.5 MB)
3 Macro/Meso-scales Components and Characteristics

Principles, Metrics and Types of Cross-scale Incompatibilities

Incompatibilities of Macro/Meso Parts with Micro/Nano Parts

Integrating Constraints on Macro/Meso-scale Parts

Fundamental Principles Prof. Martin L. Culpepper ( PDF - 2.6 MB)
4 Micro-scale Components and Characteristics

Principles of Macro/Meso-scale and Micro-scale Part Integration

Incompatibilities of Micro Parts with Nano Parts

Micro-scale Part Errors and Implications for Integration

Fundamental Principles Prof. Martin L. Culpepper ( PDF - 1.3 MB)
5 Nano-scale Components and Characteristics

Principles of nm-scale Physics which Govern Integration Incompatibility

Nano-scale Actuators, Structures and Sensors

Trasmissability of Nano-scale Errors to other Scales

Fundamental Principles Prof. Martin L. Culpepper ( PDF - 1.7 MB)
6 Scanning Probe Microscopy Project Introduction

Project Goals and Expectations

Demonstration of 2.76 SPM

Questions, Team Selection and Planning

Case Study/Application Soohyung Kim, Course TA ( PDF)
7 Piezo MEMS: Materials

Piezoelectricity

Materials

Processing

Fundamental Principles Prof. Sang-Gook Kim ( PDF 1 of 2 - 3.0 MB)

( PDF 2 of 2 - 2.4 MB)

8 Piezoelectric MEMS: Applications

Piezoelectric Transducers

Micro-actuators

Sensors and Generators

Case Study/Application Prof. Sang-Gook Kim ( PDF - 1.7 MB)
9 Optical MEMS

Functionality

Devices

Materials

Fundamental Principles Prof. Sang-Gook Kim ( PDF)
10 Nominal and Statistical Error Budgets

Principles of Determinism, Accuracy, Repeatability

Kinematic Error Modeling of Rigid-flexible Systems

Nominal and Probabilitic System Error Modeling

Design and Manufacturing Prof. Martin L. Culpepper ( PDF)
11 Presentations on Paper Critiques   Students  
12 Mechanical Interfaces for Cross-scale Alignment

Principles of Mechanical Constraint

Design of Rigid, Flexible and Rigid-flexible Constraint

Manufacturing and Assembly of Cross-scale Interfaces

Design and Manufacturing Prof. Martin L. Culpepper ( PDF - 2.5 MB)
13 Mechanisms for Inter-scale Motion

Principles of Mass, Momentum and Energy Incompatibility

Momentum Incompatibilities

Energy Incompatibilities

Design and Manufacturing Prof. Martin L. Culpepper ( PDF)
14 Carbon Nanotubes

Synthesis

Properties and Applications

Issues of Manufacturing

Design and Manufacturing Prof. Sang-Gook Kim ( PDF - 2.9 MB)
15 Complexity of MuSS

Uncertainty and Difficulty

Complexity

Functional Periodicity

Design and Manufacturing Prof. Sang-Gook Kim ( PDF - 1.1 MB)
16 Metrology

System Requirements

Components and Selection Process

Metrology-Machine Integration

Design and Manufacturing Guest Lecturer  
17 Telescopes and the Oil Industry

X-Ray Telescopes

Oil-well MEMS Sensors

Questions and Discussion

Case Study/Application Guest Lecturer  
18 Data Acquisition, Sensors and Control

Programming in Simulink®

Introduction to dSPACE Control System

Demonstration of Acquisition and Control System

Design and Manufacturing Guest Lecturer  

Course Info

Learning Resource Types

notes Lecture Notes
group_work Projects
assignment Problem Sets
assignment Written Assignments