Labs
02.jpg
Description:
This image shows Daniel opening the plasma cleaner. This device surrounds the wafers with an oxygen plasma, which is used to clean the surface and remove any impurities.
Resource Type:
Labs
file
55 kB
02.jpg
Alt text:
A cube-shaped metal device with a door on the front.
Caption:
This image shows Daniel opening the plasma cleaner. This device surrounds the wafers with an oxygen plasma, which is used to clean the surface and remove any impurities.
Credit:
Photo by Dr. Aranyosi.
Course Info
As Taught In
Spring
2007
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