Labs
09.jpg
Description:
The wafer here has a glob of SU-8 on the center. After spinning, most of the SU-8 ends up on the walls of the spinner, which is why they are covered in foil. A thin layer remains on the wafer. The speed at which the spinner is run helps determine the final thickness of SU-8 — the faster the spinning, the thinner the layer. For a 40 µm layer, the wafer is spun at about 10,000 RPM.
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Labs
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09.jpg
Alt text:
Glob of SU-8 on wafer.
Caption:
The wafer here has a glob of SU-8 on the center. After spinning, most of the SU-8 ends up on the walls of the spinner, which is why they are covered in foil. A thin layer remains on the wafer. The speed at which the spinner is run helps determine the final thickness of SU-8 — the faster the spinning, the thinner the layer. For a 40 µm layer, the wafer is spun at about 10,000 RPM.
Credit:
Photo by Dr. Aranyosi.
![Glob of SU-8 on wafer.](/courses/hst-410j-projects-in-microscale-engineering-for-the-life-sciences-spring-2007/dab17f05190e95154e2553d07946b02d_09.jpg)
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2007
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