HST.410J | Spring 2007 | Undergraduate

Projects in Microscale Engineering for the Life Sciences

Labs

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Description:

The wafer here has a glob of SU-8 on the center. After spinning, most of the SU-8 ends up on the walls of the spinner, which is why they are covered in foil. A thin layer remains on the wafer. The speed at which the spinner is run helps determine the final thickness of SU-8 — the faster the spinning, the thinner the layer. For a 40 µm layer, the wafer is spun at about 10,000 RPM.

Resource Type:
Labs
Alt text:
Glob of SU-8 on wafer.
Caption:
The wafer here has a glob of SU-8 on the center. After spinning, most of the SU-8 ends up on the walls of the spinner, which is why they are covered in foil. A thin layer remains on the wafer. The speed at which the spinner is run helps determine the final thickness of SU-8 — the faster the spinning, the thinner the layer. For a 40 µm layer, the wafer is spun at about 10,000 RPM.
Credit:
Photo by Dr. Aranyosi.
Glob of SU-8 on wafer.
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