Labs
10.jpg
Description:
After spinning, the wafer is transferred to a hot plate for a process called a “soft bake”. This process gets rid of the solvent that is mixed in with the SU-8 to keep it from hardening in the bottle. It also helps the SU-8 adhere to the wafer.
Resource Type:
Labs
file
49 kB
10.jpg
Alt text:
Wafer is carefully transferred to a hot plate.
Caption:
After spinning, the wafer is transferred to a hot plate for a process called a “soft bake”. This process gets rid of the solvent that is mixed in with the SU-8 to keep it from hardening in the bottle. It also helps the SU-8 adhere to the wafer.
Credit:
Photo by Dr. Aranyosi.
Course Info
As Taught In
Spring
2007
Level
Topics
Learning Resource Types
collections
Image Gallery
assignment
Problem Sets
notes
Lecture Notes
assignment
Written Assignments
assignment
Presentation Assignments
