Labs
11.jpg
Description:
To keep the hot plates clean, the SU-8 coated wafer is placed in the center of a larger wafer. This process ensures a good thermal contact between the hot plate and the wafer.
Resource Type:
Labs
file
51 kB
11.jpg
Alt text:
Wafer is transferred to a larger, also-circular wafer.
Caption:
To keep the hot plates clean, the SU-8 coated wafer is placed in the center of a larger wafer. This process ensures a good thermal contact between the hot plate and the wafer.
Credit:
Photo by Dr. Aranyosi.
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Spring
2007
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