Labs
16.jpg
Description:
The mask is held in place on the aligner, as shown here. To maximize the fidelity with which the mask pattern is transferred to the SU-8, the wafer is brought into direct contact with the mask. For this purpose, it is important to place the emulsion side down, so that the mask pattern is not separated from the wafer by the thickness of the mylar sheet.
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Labs
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16.jpg
Alt text:
Mask clamped in place, aligned over wafer.
Caption:
The mask is held in place on the aligner, as shown here. To maximize the fidelity with which the mask pattern is transferred to the SU-8, the wafer is brought into direct contact with the mask. For this purpose, it is important to place the emulsion side down, so that the mask pattern is not separated from the wafer by the thickness of the mylar sheet.
Credit:
Photo by Dr. Aranyosi.
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Spring
2007
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