Labs
22.jpg
Description:
Once the mask and wafer are in place and aligned, a UV light is turned on to expose the wafer. The light shines through the mask, so only the regions corresponding to transparent parts of the mask are exposed. Notice that everyone is wearing goggles to protect their eyes from harmful UV rays.
Resource Type:
Labs
file
67 kB
22.jpg
Alt text:
Students in goggles watch as UV light irradiates masked wafer.
Caption:
Once the mask and wafer are in place and aligned, a UV light is turned on to expose the wafer. The light shines through the mask, so only the regions corresponding to transparent parts of the mask are exposed. Notice that everyone is wearing goggles to protect their eyes from harmful UV rays.
Credit:
Photo by Dr. Aranyosi.
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Spring
2007
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