Labs
25.jpg
Description:
After exposure the wafer is placed back on the hot plates for a process called a “hard bake”. Following that, they are immersed in SU-8 developer. This chemical removes the SU-8 that has not polymerized (i.e., has not been exposed to UV light). After this step the pattern on the wafer becomes visible.
Resource Type:
Labs
file
53 kB
25.jpg
Alt text:
Label on the bottle of SU-8 developer.
Caption:
After exposure the wafer is placed back on the hot plates for a process called a “hard bake”. Following that, they are immersed in SU-8 developer. This chemical removes the SU-8 that has not polymerized (i.e., has not been exposed to UV light). After this step the pattern on the wafer becomes visible.
Credit:
Photo by Dr. Aranyosi.
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Spring
2007
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