The calendar below provides information on the course’s lecture, lab, and quiz sessions. In addition, the instructor for each session is given according to the following key:
MAS = Martin Schmidt
RCOH = Robert O’ Handley
SR = Susan Ruff
LEC #  TOPICS  LABS  KEY DATES 

1 
Overview/Safety/Lab Assignment (MAS)
CIM: Introduction to CIM (SR) 
Homework 1 out  
2  IC Lab  Overview (MAS)  IC1: Gate Oxide/Poly  
3  Oxidation (MAS) 
Homework 1 due
Homework 2 out 

IC2: Backside Etch  
4  Diffusion (RCOH) 
Homework 2 due
Homework 3 out 

5 
IC Lab: Testing (MAS)
CIM: Writing Technical Reports (SR) 
IC3: Test  IC lab report out 
6  Diffusion/Implantation (RCOH)  
7  MEMS Lab: Overview (MAS)  MEMS1: Photolith 
Homework 3 due
IC lab report due (in lab) 
8  Vacuum System (RCOH)  Homework 4 out  
9  CVD (RCOH)  
10 
Sputtering (RCOH)
CIM: Feedback on IC Report, Reports Returned (SR) 
MEMS2: KOH Etch 
Homework 4 due
Homework 5 out 
Quiz 1: Through CVD (Staff)  
11  Fluids Lab: Overview (MAS)  Fluids1: Photolith  
12  Evaporation (RCOH)  Revised IC report due  
13  MEMS Lab: Testing (MAS)  MEMS3: Test 
Homework 5 due
MEMS lab report out 
14  Lithography (MAS) 
Homework 6 out
Revised IC report returned 

15  Lithography, Soft Lithography (MAS)  
16  Etching (Wet) (RCOH) 
Homework 6 due
Homework 7 out 

17  Etching (Dry) (RCOH)  Fluids2: Molding  MEMS lab report due 
18  CMOS (MAS) 
Homework 7 due
Homework 8 out 

19  Advanced Silicon Devices (MAS)  
20  Fluids Lab: Testing (MAS) 
Homework 8 due
Take home exam out 

21  Take Home Introduction / Patents (MAS)  Fluids3: Test  Fluids lab report out 
Quiz 2: Through Advanced Silicon Devices (Staff)  
22  Take Home Discussion (MAS)  
23  Advanced Topics (Guest)  Fluids lab report due  
24  Advanced Topics (cont.) (Guest)  
25  Analog Devices Fab Tour  Take home quiz due 