6.152J | Fall 2005 | Undergraduate
Micro/Nano Processing Technology


The calendar below provides information on the course’s lecture, lab, and quiz sessions. In addition, the instructor for each session is given according to the following key:

MAS = Martin Schmidt
RCOH = Robert O’ Handley
SR = Susan Ruff

1 Overview/Safety/Lab Assignment (MAS)

CIM: Introduction to CIM (SR)

Homework 1 out
2 IC Lab - Overview (MAS) IC-1: Gate Oxide/Poly

3 Oxidation (MAS)

Homework 1 due

Homework 2 out

IC-2: Backside Etch

4 Diffusion (RCOH)

Homework 2 due

Homework 3 out

5 IC Lab: Testing (MAS)

CIM: Writing Technical Reports (SR)

IC-3: Test IC lab report out
6 Diffusion/Implantation (RCOH)

7 MEMS Lab: Overview (MAS) MEMS-1: Photolith Homework 3 due

IC lab report due (in lab)

8 Vacuum System (RCOH)

Homework 4 out

10 Sputtering (RCOH)

CIM: Feedback on IC Report, Reports Returned (SR)

MEMS-2: KOH Etch Homework 4 due

Homework 5 out

Quiz 1: Through CVD (Staff)

11 Fluids Lab: Overview (MAS) Fluids-1: Photolith

12 Evaporation (RCOH)

Revised IC report due
13 MEMS Lab: Testing (MAS) MEMS-3: Test Homework 5 due

MEMS lab report out

14 Lithography (MAS)

Homework 6 out

Revised IC report returned

15 Lithography, Soft Lithography (MAS)

16 Etching (Wet) (RCOH)

Homework 6 due

Homework 7 out

17 Etching (Dry) (RCOH) Fluids-2: Molding MEMS lab report due

Homework 7 due

Homework 8 out

19 Advanced Silicon Devices (MAS)

20 Fluids Lab: Testing (MAS)

Homework 8 due

Take home exam out

21 Take Home Introduction / Patents (MAS) Fluids-3: Test Fluids lab report out

Quiz 2: Through Advanced Silicon Devices (Staff)

22 Take Home Discussion (MAS)

23 Advanced Topics (Guest)

Fluids lab report due
24 Advanced Topics (cont.) (Guest)

25 Analog Devices Fab Tour

Take home quiz due
Learning Resource Types
assignment_turned_in Problem Sets with Solutions
grading Exams with Solutions
notes Lecture Notes