The calendar below provides information on the course’s lecture, lab, and quiz sessions. In addition, the instructor for each session is given according to the following key:
MAS = Martin Schmidt
RCOH = Robert O’ Handley
SR = Susan Ruff
| LEC # | TOPICS | LABS | KEY DATES |
|---|---|---|---|
| 1 |
Overview/Safety/Lab Assignment (MAS)
CIM: Introduction to CIM (SR) |
Homework 1 out | |
| 2 | IC Lab - Overview (MAS) | IC-1: Gate Oxide/Poly | |
| 3 | Oxidation (MAS) |
Homework 1 due
Homework 2 out |
|
| IC-2: Backside Etch | |||
| 4 | Diffusion (RCOH) |
Homework 2 due
Homework 3 out |
|
| 5 |
IC Lab: Testing (MAS)
CIM: Writing Technical Reports (SR) |
IC-3: Test | IC lab report out |
| 6 | Diffusion/Implantation (RCOH) | ||
| 7 | MEMS Lab: Overview (MAS) | MEMS-1: Photolith |
Homework 3 due
IC lab report due (in lab) |
| 8 | Vacuum System (RCOH) | Homework 4 out | |
| 9 | CVD (RCOH) | ||
| 10 |
Sputtering (RCOH)
CIM: Feedback on IC Report, Reports Returned (SR) |
MEMS-2: KOH Etch |
Homework 4 due
Homework 5 out |
| Quiz 1: Through CVD (Staff) | |||
| 11 | Fluids Lab: Overview (MAS) | Fluids-1: Photolith | |
| 12 | Evaporation (RCOH) | Revised IC report due | |
| 13 | MEMS Lab: Testing (MAS) | MEMS-3: Test |
Homework 5 due
MEMS lab report out |
| 14 | Lithography (MAS) |
Homework 6 out
Revised IC report returned |
|
| 15 | Lithography, Soft Lithography (MAS) | ||
| 16 | Etching (Wet) (RCOH) |
Homework 6 due
Homework 7 out |
|
| 17 | Etching (Dry) (RCOH) | Fluids-2: Molding | MEMS lab report due |
| 18 | CMOS (MAS) |
Homework 7 due
Homework 8 out |
|
| 19 | Advanced Silicon Devices (MAS) | ||
| 20 | Fluids Lab: Testing (MAS) |
Homework 8 due
Take home exam out |
|
| 21 | Take Home Introduction / Patents (MAS) | Fluids-3: Test | Fluids lab report out |
| Quiz 2: Through Advanced Silicon Devices (Staff) | |||
| 22 | Take Home Discussion (MAS) | ||
| 23 | Advanced Topics (Guest) | Fluids lab report due | |
| 24 | Advanced Topics (cont.) (Guest) | ||
| 25 | Analog Devices Fab Tour | Take home quiz due |
