6.152J | Fall 2005 | Undergraduate
Micro/Nano Processing Technology


Wherever possible, the book citations below reflect the specific editions used in the course.


Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice, and Modeling. Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 9780130850379.

Laboratory Manual (available to students enrolled in the course)

Additional References

Campbell, Stephen. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.

Wolf, Stanley, and Richard Tauber. Silicon Processing for the VLSI Era. Vol. 1. Sunset Beach, CA: Lattice Press, 1986. ISBN: 9780961672133.

Sze, Simon. VLSI Technology. 2nd ed. New York, NY: McGraw-Hill, 1988. ISBN: 9780070627352.

Ghandi, Sorab. VLSI Fabrication Principles: Silicon and Gallium Arsenide. 2nd ed. New York, NY: Wiley-Interscience, 1994. ISBN: 9780471580058.

Pierret, Robert, and Gerold Neudeck. Modular Series on Solid State Devices. Reading, MA: Addison-Wesley, 1982. ISBN: 9780201052879.

Grove, A. S. Physics and Technology of Semiconductor Devices. New York, NY: Wiley, 1967. ISBN: 9780471329985.

Colclaser, R. A. Microelectronics Processing and Device Design. New York, NY: Wiley, 1980. ISBN: 9780471043393.

Vossen, John, and Werner Kern. Thin Film Processes. Burlington, MA: Academic Press, 1978. ISBN: 9780127282503.

Mayer, James, and Sylvanus Lau. Electronic Materials Science: For Integrated Circuits in Si and GaAs. Upper Saddle River, NJ: Prentice Hall, 1989. ISBN: 9780023781407.

Murarka, Shyam, and Martin Peckerar. Electronic Materials: Science and Technology. Burlington, MA: Academic Press, 1989. ISBN: 9780125111201.

Ohring, Milton. The Materials Science of Thin Films. 2nd ed. Burlington, MA: Academic Press, 2001. ISBN: 9780125249751.

Senturia, Stephen. Microsystem Design. New York, NY: Springer-Verlag, 2004. ISBN: 9780792372462.

Madou, Marc. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. Boca Raton, FL: CRC Press, 2002. ISBN: 9780849308260.

Kovacs, Gregory. Micromachined Transducers Sourcebook. New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.

May, G. S., and S. Sze. Fundamentals of Semiconductor Fabrication. New York, NY: John Wiley & Sons, Inc., 2003. ISBN: 9780471232797.

Smith, D. L. Thin Film Deposition: Principles and Practice. New York, NY: McGraw-Hill, 1995. ISBN: 9780070585027.

Writing References

Gopen, and Swan. “The Science of Scientific Writing.” American Scientist 78 (Nov-Dec 1990): 550-558.

Perleman, Leslie, and Edward Barrett. The Mayfield Handbook of Technical & Scientific Writing. New York, NY: McGraw Hill, 1997. ISBN: 9781559346474.

Other Resources


  • IEEE Transactions on Electron Devices

  • IEEE Electron Device Letters

  • Journal of Applied Physics

  • Applied Physics Letters

  • Journal of the Electrochemical Society

  • Journal of Crystal Growth

  • Journal of Electronic Materials

  • IEEE Journal of Microelectromechanical Systems

  • Lab on a Chip

  • IOP Journal of Microengineering

Learning Resource Types
assignment_turned_in Problem Sets with Solutions
grading Exams with Solutions
notes Lecture Notes