Resources | Physics of Microfabrication: Front End Processing | Electrical Engineering and Computer Science

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Lecture Audio

video

85 MB

3. Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)

video

96 MB

4. Wafer Cleaning and Gettering (cont.)

video

107 MB

5. Wafer Cleaning and Gettering - Contamination Measurement Techniques

video

103 MB

6. Oxidation and the Si/SiO2 Interface. Deal/Grove Model, Thin Oxide Models

video

100 MB

7. Oxidation and the Si/SiO2 Interface. 2D Effects, Doping Effects, Point Defect

video

88 MB

8. Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic

video

85 MB

9. Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects

video

110 MB

10. Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion

video

107 MB

11. Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques

video

107 MB

12. Ion Implantation and Annealing - Analytic Models and Monte Carlo

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Course Info

Instructors

Departments

Electrical Engineering and Computer Science

As Taught In

Fall 2004

Level

Graduate

Topics

Learning Resource Types

Lecture Audio

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