Lec # | TOPICS | KEY DATES |
---|---|---|
1 |
Introduction to 6.774 CMOS Process Flow |
|
2 |
Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers |
Homework 1 out |
3 |
Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.) Wafer Cleaning and Gettering |
|
4 |
Wafer Cleaning and Gettering (cont.) |
Homework 1 due |
5 |
Wafer Cleaning and Gettering - Contamination Measurement Techniques Oxidation and the Si/SiO2 Interface - Uses of Oxides and CV Measurement Techniques |
Homework 2 out |
6 |
Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models |
|
7 |
Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defects |
Homework 2 due |
8 |
Dopant Diffusion - Need for Abrupt Profiles, Fick’s Laws, Simple Analytic |
Homework 3 out |
9 |
Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects |
|
10 |
Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion |
|
11 |
Dopant Diffusion - Review Atomic Scale Models, Profile Measurement Techniques |
Homework 3 due |
12 |
Ion Implantation and Annealing - Analytic Models and Monte Carlo |
|
13 |
Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED |
Homework 4 out |
14 |
Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction |
|
15 |
Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail |
|
16 |
The SUPREM IV Process Simulator |
Homework 4 due |
17 |
Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth |
Homework 5 out |
18 |
Thin Film Deposition and Epitaxy - CVD Examples and PVD |
|
19 |
Thin Film Deposition and Epitaxy - Modeling Topography of Deposition |
Homework 5 due |
20 |
Etching - Introduction |
|
21 |
Etching - Poly Gate Etching, Stringers, Modeling of Etching |
|
22 |
Silicides, Device Contacts, Novel Gate Materials |
|
23 |
Growth and Processing of Strained Si/SiGe and Stress Effects on Devices |
|
24-26 |
Report Presentations |
Calendar
Course Info
Instructors
Departments
As Taught In
Fall
2004
Level
Topics
Learning Resource Types
equalizer
Lecture Audio