Course Meeting Times

Lectures: 2 sessions / week, 1.5 hours / session

Course Objectives

  • Thorough understanding of the unit process steps
  • Exposure to modern CMOS process flow and integration issues
  • Introduction to the impact of processing on device electrical performance
  • Awareness of epitaxial growth, characterization, and processing of SiGe
  • Basic understanding of the SUPREM IV process simulator

Note: This field changes dramatically every few years. Keeping up with the latest developments is a continuous process.

Who should take this Class

Anyone considering graduate research or a career in microelectronics or microfabrication.


Exposure to basic concepts covered in 6.152J helpful but not required.

Required Text

Buy at Amazon Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice and Modeling. Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 0130850373.


Homework (5 Homework Assignments) 50%
Term Project 50%

Term Project

Paper: maximum length of 20 pages, or

In-Class Presentation (with handouts): 17 minutes, plus 3 minutes for questions/discussion.