Course Meeting Times

Lectures: 2 sessions / week, 1.5 hours / session


Either or both 2.010, 15.075 or equivalent (either or both statistics or classical controls).

Required Text

Montgomery, Douglas C. Introduction to Statistical Quality Control. 5th ed. New York, NY: Wiley, 2004. ISBN: 9780471656319.

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Hoboken, NJ: Wiley-Interscience, 2006. ISBN: 9780471784067.

Reference Texts

For Processes

Kalpakjian, S. Manufacturing Processes for Engineering Materials. 3rd ed. Menlo Park, CA: Addison Wesley, 1996. ISBN: 9780201823707.

For Statistical Analysis, SPC and Designed Experiments

Devor, R. E., T. Chang, and J. W. Sutherland. Statistical Quality Design and Control. New York, NY: Macmillan, 1992. ISBN: 9780023291807.

Hogg, R. V., and J. Ledotter. Engineering Statistics. New York, NY: Macmillan, 1987. ISBN: 9780023557903.

Bendat, J. S., and A. G. Piersol. Random Data. 2nd ed. New York, NY: Wiley Interscience, 2000. ISBN: 9780471317333.

For Feedback Control and Stochastic Control

Ogata, Katsuhiko. Modern Control Engineering. 3rd ed. Upper Saddle River, NJ: Prentice Hall, 1996. ISBN: 9780132273077.

Friedland, B. Control System Design. New York, NY: McGraw Hill, 1985. ISBN: 9780070224414.


Problem sets 50%
Quizzes 40%
Class participation 10%



All except Optimization Project are to be individual efforts.