2.674 | Spring 2016 | Undergraduate

Micro/Nano Engineering Laboratory

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Description:

History of Micro ElectroMechanical Systems. Image by MIT OpenCourseWare.

Alt text:
A diagram listing MEMS records between 1950 and 2000.
Caption:
History of Micro ElectroMechanical Systems. (Image by MIT OpenCourseWare.)
Credit:
Image by MIT OpenCourseWare.
A diagram listing MEMS records between 1950 and 2000.