3-46s06.jpg
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A photonic crystal waveguide manufactured on a silicon wafer using thermal oxidation, UV lithography and chemical vapor deposition at MIT’s Microsystems Technology Laboratories (MTL). See Y. Yi, S. Akiyama, L.C. Kimerling et al., optics express 12 no. 20 (2004):4775-4780. (Photo courtesy of Prof. Lionel C. Kimerling.)
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3-46s06.jpg
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Microscope photo of end view of a multi-layered waveguide.
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A photonic crystal waveguide manufactured on a silicon wafer using thermal oxidation, UV lithography and Chemical Vapor Deposition at MIT’s Microsystems Technology Laboratories (MTL). See: Yi, Y., S. Akiyama, L. C. Kimerling, et al. Optics Express 12, no. 20 (2004): 4775-4780. (Photo by Prof. Lionel C. Kimerling.)
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