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Instructors

  • Prof. Carol Livermore
  • Prof. Joel Voldman

Departments

  • Electrical Engineering and Computer Science
  • Mechanical Engineering

As Taught In

Spring 2007

Level

Graduate

Topics

  • Engineering
    • Electrical Engineering
      • Electronics
    • Mechanical Engineering
      • Microtechnology
    • Nanotechnology
  • Science
    • Physics
      • Electromagnetism

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6.777J | Spring 2007 | Graduate

Design and Fabrication of Microelectromechanical Devices

  • Syllabus

  • Calendar

  • Readings

  • Lecture Notes

  • Assignments

  • Projects

Journal of Microelectromechanical Systems (IEEE/ASME)

Course Info

Instructors

  • Prof. Carol Livermore
  • Prof. Joel Voldman

Departments

  • Electrical Engineering and Computer Science
  • Mechanical Engineering

As Taught In

Spring 2007

Level

Graduate

Topics

  • Engineering
    • Electrical Engineering
      • Electronics
    • Mechanical Engineering
      • Microtechnology
    • Nanotechnology
  • Science
    • Physics
      • Electromagnetism

Learning Resource Types

notes Lecture Notes
assignment_turned_in Problem Set Solutions
assignment Problem Sets
assignment Programming Assignments
group_work Projects

Download Course
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