The required textbook readings are listed by session below.

Required Textbook

Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.

This Web site for the textbook contains the textbook errata and supplementary materials.

Supplementary Readings

Books and Monographs

Madou, Marc. Fundamentals of Microfabrication. Boca Raton, FL: CRC Press, 1998. ISBN: 9780849394515. The 2002 edition is also fine.

Kovacs, Gregory T. A. Micromachined Transducers Sourcebook. New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.

Maluf, Nadim. An Introduction to Microelectromechanical Systems Engineering. Boston, MA: Artech House, 1999. ISBN: 9780890065815.

Nathan, Arokia, and Henry Baltes. Microtransducer CAD: Physical and Computational Aspects. New York, NY: Springer, 1999. ISBN: 9783211831038.

Romanowicz, Bartlomiej. Methodology for the Modeling and Simulation of Microsystems. New York, NY: Springer, 1997. ISBN: 9780792383062.

Tabib-Azar, Masood. Microactuators. Norwell, MA: Kluwer Academic, 1997. ISBN: 9780792380894.

Gardner, Julian W. Microsensors: Principles and Applications. New York, NY: John Wiley and Sons, 1994. ISBN: 9780471941361.

Ristic, Ljubisa, ed. Sensor Technology and Devices. Boston, MA: Artech House, 1994. ISBN: 9780890065327.

Ballantine, D. S, Jr., et al. Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications. Burlington, MA: Academic Press, 1996. ISBN: 9780120774609.

De Los Santos, Hector J. Introduction to Microelectromechanical (MEM) Microwave Systems. Boston, MA: Artech House, 1999. ISBN: 9780890062821.

Gere, James M., and Stephen P. Timoshenko. Mechanics of Materials. 2nd ed. Pacific Grove, CA: Brooks/Cole, 1984. ISBN: 9788123908946.

A more recent edition: 
Gere, James, and Barry Goodno. Mechanics of Materials. Florence, KY: Cengage-Engineering, 2008. ISBN: 9780534553975.

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.

IEEE Reprint Books

Muller, Richard S., Roger T. Howe, and Stephen D. Senturia, eds. Microsensors. New York, NY: IEEE Press, 1991. ISBN: 9780879422455.

Trimmer, William, ed. Micromechanics and MEMS. New York, NY: Wiley-IEEE Press, 1997. ISBN: 9780780310858.


Journal of Microelectromechanical Systems (IEEE/ASME)

Sensors and Actuators (Elsevier)

Journal of Micromechanics and Microengineering (IOP)

Major Conference Proceedings

Transducers ‘XX (International Conference on Solid-State Sensors and Actuators), odd-numbered years since 1983, proceedings available from IEEE (US Meetings), Elsevier (European Meetings), IEE Japan (Japanese Meetings).

MEMS ‘XX (IEEE Workshop on Micro Electro Mechanical Systems), annual since 1989.

Eurosensors ‘XX, annual since 1987, proceedings published in special issues of Sensors and Actuators.

Note: The ‘XX’ in the above conference proceedings are used as placeholders for a unique year and should not be confused with the roman numeral “20”.

Solid-State Sensors and Actuators Workshop, Hilton Head, SC, even-numbered years since 1984, proceedings available from Transducer Research Foundation.

Japanese Sensor Symposium, annual since 1982; technical digest published in English by the Institute of Electrical Engineers of Japan (IEE).

Readings by Session

All readings presented in the table below refer to the required textbook:

Senturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.

1 Introduction to MEMS; microfabrication for MEMS: part I Chapters 1 and 2
2 Microfabrication for MEMS: part II Chapters 3 and 4
3 Microfabrication for MEMS: part III Chapters 3 and 4
4 Microfabrication for MEMS: part IV; in-class fab problem Chapters 3 and 5
5 Fabrication for the life sciences; material properties  
6 Elasticity or electronics I Chapters 8 and 14
7 Structures or electronics II Chapters 9 and 14
8 Lumped-element modeling Chapter 5
9 Energy-conserving transducers Chapter 6
10 Dynamics, especially nonlinear Chapter 7
11 Structures special topics Chapter 10
12 Thermal energy domain; dissipation Chapter 11
13 Modeling dissipative processes Chapter 12
14 Fluids 1 Chapter 13
15 Fluids 2 Chapter 13
16 Transport Chapter 13
17 Feedback Chapter 15
18 Noise Chapter 16
19 Packaging Chapter 17
20 In-class design problem  
21 Design tradeoffs  
22 Power MEMS case study  
23 Optical MEMS case study Chapter 20
24 Capacitive accelerometer case study Chapter 19
25 BioMEMS case study Chapter 22
  Final presentations  

Learning Resource Types
Problem Sets with Solutions
Lecture Notes
Programming Assignments