6.777J | Spring 2007 | Graduate

Design and Fabrication of Microelectromechanical Devices

Lecture Notes

07lecture02.pdf

Description:

Lecture slides on microfabrication for MEMS, substrates, lithography and patterning, doping, thin films.

Resource Type:
Lecture Notes
pdf
1 MB
07lecture02.pdf
Download File

Course Info

Departments
As Taught In
Spring 2007
Level
Graduate
Topics
Learning Resource Types
Lecture Notes
Problem Set Solutions
Problem Sets
Programming Assignments
Projects
Download Course
MIT Open Learning
Over 2,500 courses & materials
Freely sharing knowledge with learners and educators around the world. Learn more
© 2001–2026 Massachusetts Institute of Technology
Accessibility
Creative Commons License
Terms and Conditions
Proud member of:
© 2001–2026 Massachusetts Institute of Technology