6.777J | Spring 2007 | Graduate

Design and Fabrication of Microelectromechanical Devices

Lecture Notes

07lecture03.pdf

Description:

Lecture slides on microfabrication for MEMS, etching, wafer bonding, surface micromachining, and process integration.

Resource Type:
Lecture Notes
pdf
1 MB
07lecture03.pdf
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Spring 2007
Level
Graduate
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Lecture Notes
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