Lecture Notes
07lecture21.pdf
Description:
Lecture slides on design choices, MEMS actuators, sorting through design options, actuator characteristics, examples of actuators, and theoretical and practical limits: electrostatic, thermal, piezoelectric, magnetic.
Resource Type:
Lecture Notes
pdf
2 MB
07lecture21.pdf
Course Info
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Spring
2007
Level
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notes
Lecture Notes
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Problem Set Solutions
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