6.777J | Spring 2007 | Graduate

Design and Fabrication of Microelectromechanical Devices

Lecture Notes

07lecture21.pdf

Description:

Lecture slides on design choices, MEMS actuators, sorting through design options, actuator characteristics, examples of actuators, and theoretical and practical limits: electrostatic, thermal, piezoelectric, magnetic.

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Lecture Notes
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07lecture21.pdf
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Spring 2007
Level
Graduate
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