6.777J | Spring 2007 | Graduate

Design and Fabrication of Microelectromechanical Devices

Assignments

ps2.pdf

Description:

Problem set on crayon engineering, debugging and recreating a process and mask set for a polysilicon surface micromachined cantilever, and creating process and mask set for a thermal bimorph cantilever and literature treasure hunt.

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Spring 2007
Level
Graduate
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