Course Description
6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control …
6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.
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![Prototype design of a microsystem cooler.](/courses/6-777j-design-and-fabrication-of-microelectromechanical-devices-spring-2007/48d6e35d863672759d9e08a0056cb84b_6-777js07.jpg)
An illustration of the prototype design of a microsystem cooler that is being fabricated at the NASA Glenn Research Center. The microsystem cooler is suited mostly to volume-limited applications that require cooling below the ambient or sink temperature. (Image courtesy of NASA Glenn Research Center.)