12.141 | January IAP 2012 | Undergraduate

Electron Microprobe Analysis


1 Introduction; electron-specimen interactions; electron detectors; scanning electron imaging (backscattered and secondary electron, BSE and SE); cathodoluminescence (CL) imaging; qualitative analysis using BSE imaging and energy dispersive spectrometry (EDS). Problem set 1 out
2 X-ray generation, emission, detection and measurement; wavelength dispersive spectrometer (WDS); analyzing crystals and proportional counters; WDS signal processing with single channel analyzer; compositional imaging (X-ray mapping) using WDS. Problem set 2 out
3 Quantitative analysis using WDS; sample preparation; carbon coating; peak and background in WD spectra; detector settings through pulse height analysis; peak overlap corrections. Problem set 3 out
4 Matrix (ZAF) corrections in quantitative analysis; φ(ρz) corrections. Problem set 4 out

Course Info

As Taught In
January IAP 2012
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Lecture Notes
Problem Sets