6.152J | Fall 2005 | Undergraduate
Micro/Nano Processing Technology

Lecture Notes

The instructor for each lecture is provided below according to the following key:

MAS = Martin Schmidt
RCOH = Robert O’ Handley
SR = Susan Ruff

A note on CI-M: CI-M refers to the “Communication Intensive in the Major” requirement for juniors and seniors. CIM courses practice forms of communication that are specific to the professional and academic culture of the discipline.

LEC # topics LecturerS
1 Overview/Safety/Lab Assignment (PDF)

CI-M: Introduction to CI-M

MAS

SR

2 IC Lab - Overview (PDF) MAS
3 Oxidation MAS
4 Diffusion (PDF - 4.5 MB) RCOH
5 IC Lab: Testing (PDF)

CI-M: Writing Technical Reports (PDF)

MAS

SR

6 Diffusion/Implantation (PDF) RCOH
7 MEMS Lab: Overview (PDF) MAS
8 Vacuum System (PDF) RCOH
9 CVD (PDF) RCOH
10 Sputtering (PDF)

CI-M: Feedback on IC Report, Reports Returned (PDF)

RCOH

SR
 

11 Fluids Lab: Overview MAS
12 Evaporation (PDF - 2.6 MB) RCOH
13 MEMS Lab: Testing (PDF - 1.6 MB) MAS
14 Lithography MAS
15 Lithography, Soft Lithography MAS
16 Etching (Wet) (PDF - 3.5 MB) RCOH
17 Etching (Dry) (PDF) RCOH
18 CMOS MAS
19 Advanced Silicon Devices MAS
20 Fluids Lab: Testing (PDF) MAS
21 Take Home Introduction / Patents (PDF) MAS
22 Take Home Discussion (PDF) MAS
23 Advanced Topics (Guest)  
24 Advanced Topics (cont.) (Guest)  
25 Analog Devices Fab Tour  
Learning Resource Types
assignment_turned_in Problem Sets with Solutions
grading Exams with Solutions
notes Lecture Notes