Lecture Notes
vacsci.pdf
Description:
It covers oxidation, ion implantation and diffusion, chemical vapor deposition (CVD) and physical vapor deposition (PVD).
Resource Type:
Lecture Notes
pdf
272 kB
vacsci.pdf
Course Info
Instructors
As Taught In
Fall
2005
Level
Learning Resource Types
assignment_turned_in
Problem Sets with Solutions
grading
Exams with Solutions
notes
Lecture Notes
