### Course Meeting Times

Lectures: 3 sessions / week, 1 hour / session

Recitations: 1 session / week, 1 hour / session

### Description

6.720 examines the physics of microelectronic semiconductor devices for silicon integrated circuit applications. Topics covered include: semiconductor fundamentals, p-n junction, metal-oxide semiconductor structure, metal-semiconductor junction, MOS field-effect transistor, and bipolar junction transistor. The course emphasizes physical understanding of device operation through energy band diagrams and short-channel MOSFET device design. Issues in modern device scaling are also outlined.

### Prerequisite

The prerequisites for this course are 6.012 Microelectronic Devices and Circuits or 3.42 Electronic Materials Design or equivalent.

### Level

H-level graduate subject, 12 units, 2 engineering design points.

### Assignments

There will be 9 homeworks, 3 device characterization projects (PN diode, MOSFET, BJT), and one device design project. See the calendar for information on due dates.

### Exams

There will be two quizzes and one final exam. Quiz 1 will cover Ses #L1-L12 and will take place one day after Ses #L16. Quiz 2 will cover Ses #L13-L24 and will take place one day after Ses #L25.

The final exam will cover all material but will emphasize Ses #L25-L39. It will take place during final exam week. The time and location will be decided by the Registrar. All exams are open book and a calculator is required.

### Grading

ACTIVITIES | PERCENTAGES |
---|---|

Homework | 15% |

Device characterization projects | 10% |

Design project | 10% |

Quiz 1 | 20% |

Quiz 2 | 20% |

Final exam | 25% |

### Collaboration Policy

In all take-home exercises of this subject (homework, device characterization projects, design project) you may collaborate with another student in this class. In fact, collaboration is encouraged. However, **these are not group projects** to be divided among several participants. Every individual must carry out every exercise in its entirety. Every one of the items of each exercise contains a substantial educational experience. If you collaborate with another student in any exercise, please prominently show in your solutions the name of your collaborator. Violations of this policy will be handled by MIT’s Committee on Discipline. If you have questions regarding this policy, please ask the instructor.

### Late Assignment Policy

Assignments are due at lecture on the designated date. Late homework is acceptable at the following lecture session after it is due (50% of credit only). No credit for homework later than this. Special cases can only be handled by lecturer.

Jesús del Alamo and Harry Tuller, course materials for 6.720J Integrated Microelectronic Devices, Spring 2007. MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].

### Calendar

The calendar below provides information on the course’s lecture (L) and recitation (R) sessions.

SES # | TOPICS | KEY DATES |
---|---|---|

L1 | 6.720 overview; fundamental concepts | Project 1 out |

L2 | Intrinsic, extrinsic semiconductors; conduction and valence band density of states (DOS) | |

L3 | Carrier statistics in semiconductors; Fermi level | |

L4 | Generation and recombination mechanisms; equilibrium rates | |

L5 | Generation and recombination rates outside equilibrium |
Project 1 due Homework 1 out |

R1 | Problems on carrier statistics in equilibrium, generation and recombination | |

L6 | Carrier dynamics; thermal motion | |

L7 | Drift; diffusion; transit time | |

L8 | Non-uniform doping distribution |
Homework 1 due Homework 2 out |

R2 | Problems on carrier dynamics, drift and diffusion | |

L9 | Quasi-Fermi levels; continuity equations | |

R3 | Problems on non-uniform doping distribution, quasi-Fermi levels | |

L10 | Shockley equations; majority-carrier type situations |
Homework 2 due Homework 3 out |

L11 | Minority-carrier type situations: statics | |

L12 | Minority-carrier dynamics; space-charge and high-resistivity (SCR) transport; carrier multiplication | |

R4 | Problems on majority carrier situations, minority carrier situations: statics and dynamics | |

L13 | PN junction: electrostatics in and out of equilibrium | Homework 3 due |

L14 | PN junction: depletion capacitance; current-voltage (I-V) characteristics | |

L15 | PN junction: carrier storage; diffusion capacitance; PN diode: parasitics | |

L16 | PN junction dynamics; PN diode: non-ideal and second-order effects | Quiz 1 taken 1 day after Ses #L16 |

L17 | Metal-semiconductor junction electrostatics in and out of equilibrium; capacitance-voltage (C-V) characteristics |
Project 2 out Homework 4 out |

R5 | Problems on metal-semiconductor junction, Schottky diode | |

L18 | Metal semiconductor junction I-V characteristics | |

L19 | Schottky diode; equivalent-circuit model; ohmic contacts | |

L20 | Ideal semiconductor surface |
Homework 4 due Homework 5 out |

R6 | Problems on PN junction, PN diode | |

L21 | Metal-oxide-semiconductor (MOS) in equilibrium | |

L22 | MOS outside equilibrium; Poisson-Boltzmann formulation | |

L23 | Simplifications to Poisson-Boltzmann formulation |
Homework 5 due Project 2 due |

R7 | Problems on MOS structure | |

L24 | Dynamics of MOS structure: C-V characteristics; three-terminal MOS | |

L25 | Inversion layer transport | Quiz 2 taken 1 day after Ses #L25 |

L26 | Long-channel metal-oxide-semiconductor field-effect (MOSFET): I-V characteristics |
Project 3 out Homework 6 out |

L27 | I-V characteristics (cont.): body effect, back bias | |

L28 | I-V characteristics (cont.): channel-length modulation, subthreshold regime |
Homework 6 due Homework 7 out |

R8 | Problems on long MOSFET | |

L29 | C-V characteristics; small-signal equivalent circuit models | |

L30 | Short-channel MOSFET: short-channel effects | |

L31 | MOSFET short-channel effects (cont.) |
Homework 7 due Homework 8 out |

R9 | Problems on short MOSFET | |

L32 | MOSFET scaling |
Project 4 out Project 3 due |

L33 | Evolution of MOSFET design | |

L34 | Bipolar junction transistor (BJT) intro; basic operation |
Homework 8 due Homework 9 out |

R10 | Problems on short MOSFET | |

L35 | BJT I-V characteristics in forward-active | |

L36 | Other regimes of operation of BJT | |

L37 | BJT C-V characteristics; small-signal equivalent circuit models | Homework 9 due |

L38 | BJT high-frequency characteristics | Project 4 due |

R11 | Harry’s guest lecture | |

R12 | Problems on BJT | |

L39 | BJT non-ideal effects; evolution of BJT design; bipolar issues in complementary metal-oxide-semiconductor (CMOS) |