Lecture Notes

LEC # TOPICS
1 Overview of Semiconductor Manufacturing ( PDF)
Statistical Process Control
2 Statistics Review: Distributions ( PDF)
3 Statistics Review: Estimation ( PDF)
4 Hypothesis Tests and Control Chart Introduction ( PDF)
5 Control Charts
6 Advanced Control Charts, Nested Variance ( PDF)
Experimental Design
7 Analysis and Design of Experiments ( PDF)
8 ANOVA, Variance Component Estimation
9 MANOVA, Factorial Experiments ( PDF)

Quiz #1

Yield and Yield Learning
10 Design of Experiments and Response Surface Modeling ( PDF)
11 RSM and Regression ( PDF) ( PDF)
12 Yield Management and Modeling
13 Yield Modeling
Advanced Process Control
14 Spatial Modeling
15 Sensors and Signals ( PDF)
16 PCA and Time Series
17 Run by Run Control ( PDF)
18 Real Time Control, Scheduling
Factory Operation and Design
19 Scheduling ( PDF)

Quiz #2

20 Planning ( PDF)
21 Factory Design and Efficiency ( PDF)

Course Info

Learning Resource Types

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