Lecture Notes

LEC #	TOPICS
1	Overview of Semiconductor Manufacturing (PDF)
Statistical Process Control
2	Statistics Review: Distributions (PDF)
3	Statistics Review: Estimation (PDF)
4	Hypothesis Tests and Control Chart Introduction (PDF)
5	Control Charts
6	Advanced Control Charts, Nested Variance (PDF)
Experimental Design
7	Analysis and Design of Experiments (PDF)
8	ANOVA, Variance Component Estimation
9	MANOVA, Factorial Experiments (PDF) Quiz #1
Yield and Yield Learning
10	Design of Experiments and Response Surface Modeling (PDF)
11	RSM and Regression (PDF) (PDF)
12	Yield Management and Modeling
13	Yield Modeling
Advanced Process Control
14	Spatial Modeling
15	Sensors and Signals (PDF)
16	PCA and Time Series
17	Run by Run Control (PDF)
18	Real Time Control, Scheduling
Factory Operation and Design
19	Scheduling (PDF) Quiz #2
20	Planning (PDF)
21	Factory Design and Efficiency (PDF)