6.780 | Spring 2003 | Graduate
Semiconductor Manufacturing
Course Description
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback …
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.
Learning Resource Types
assignment_turned_in Problem Sets with Solutions
grading Exams
notes Lecture Notes
group_work Projects
assignment Written Assignments
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Semiconductor manufacturing course logo. (Image courtesy of MIT.)