LEC # | TOPICS | KEY DATES |
---|---|---|
1 | Overview of Semiconductor Manufacturing | |
Statistical Process Control | ||
2 | Statistics Review: Distributions | |
3 | Statistics Review: Estimation | PS #1 Due |
4 | Hypothesis Tests and Control Chart Introduction | |
5 | Control Charts | |
6 | Advanced Control Charts, Nested Variance | PS #2 Due |
Experimental Design | ||
7 | Analysis and Design of Experiments | |
8 | ANOVA, Variance Component Estimation | PS #3 Due |
9 |
MANOVA, Factorial Experiments
Quiz #1 |
|
Yield and Yield Learning | ||
10 | Design of Experiments and Response Surface Modeling | |
11 | RSM and Regression | PS #4 Due |
12 | Yield Management and Modeling | |
13 | Yield Modeling | PS #5 Due |
Advanced Process Control | ||
14 | Spatial Modeling | |
15 | Sensors and Signals | PS #6 Due |
16 | PCA and Time Series | |
17 | Run by Run Control | Critical Paper Review Due |
18 | Real Time Control, Scheduling | |
Factory Operation and Design | ||
19 |
Scheduling
Quiz #2 |
PS #7 Due |
20 | Planning | |
21 | Factory Design and Efficiency |
Calendar
Course Info
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As Taught In
Spring
2003
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